CMP pad dresser with oriented particles and associated methods

Details CMP pad dresser with oriented particles and associated methods CMP pad dresser with oriented particles and associated methods

2009-01-16

2011-10-25

Eley, Timothy V (Department: 3723)

Abrading

Accessory

Dressing

C051S293000, C051S307000, C451S072000

Reexamination Certificate

active

08043145

ABSTRACT:
CMP pad dressers with superabrasive particles oriented into an attitude that controls CMP pad performance, and methods associated therewith are disclosed and described. The controlled CMP pad performance may be selected to optimize CMP pad dressing rate and dresser wear.

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