Abrading – Machine – Rotary tool
Patent
1998-08-31
2000-10-24
Scherbel, David A.
Abrading
Machine
Rotary tool
B24B 722
Patent
active
061358657
ABSTRACT:
A polishing apparatus for polishing a substrate. The polishing apparatus has a slurry delivery system for delivering slurry to the apparatus; a porous polishing pad having an upper surface at which the substrate is polished; and a rotating platen upon which the porous pad lies. The rotating platen has a recess which has a first portion in communication with the delivery means for delivering slurry into the first portion. The recess further has a second portion extending under the polishing pad. Slurry is delivered from the first portion to the second portion and to the upper surface of the pad where it aids in the polishing of the substrate. Preferably, the first portion of the recess is situated such that the slurry delivered to the top surface returns to the first portion for removal or reuse due to the rotational force of the rotating platen.
REFERENCES:
patent: 2820334 (1958-01-01), Touvay
patent: 4927432 (1990-05-01), Budinger et al.
patent: 4954141 (1990-09-01), Takiyama et al.
patent: 5007207 (1991-04-01), Phaal
patent: 5076024 (1991-12-01), Akagawa et al.
patent: 5246525 (1993-09-01), Sato
patent: 5329734 (1994-07-01), Yu
patent: 5486131 (1996-01-01), Cesna et al.
patent: 5487398 (1996-01-01), Ohmi et al.
patent: 5489233 (1996-02-01), Cook et al.
patent: 5533923 (1996-07-01), Shamouilian et al.
patent: 5558563 (1996-09-01), Cote et al.
patent: 5584146 (1996-12-01), Shamouillan et al.
patent: 5609719 (1997-03-01), Hempel
patent: 5643061 (1997-07-01), Jackson et al.
patent: 5645469 (1997-07-01), Burke et al.
patent: 5650039 (1997-07-01), Talieh
patent: 5658185 (1997-08-01), Morgan, III et al.
patent: 5664990 (1997-09-01), Adams et al.
patent: 5690540 (1997-11-01), Elliott et al.
patent: 5762537 (1998-06-01), Sandhu et al.
Beardsley Gary J.
Huynh Cuc Kim
Messier Steven J.
Walker David L.
International Business Machines - Corporation
Ojini Anthony
Scherbel David A.
Walter, Esq. Howard J.
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