4. Abrading
  5. Machine
  6. Rotary tool

Gary J. Beardsley

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CMP apparatus with built-in slurry distribution and removal

Abrading – Machine – Rotary tool
Patent

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CMP apparatus with built-in slurry distribution and removal

Abrading – Machine – Rotary tool
Reexamination Certificate

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Method for homogenizing device parameters through...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1766693

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