Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Patent
1997-05-21
1999-08-24
Brown, Peter Toby
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
438149, 438152, 438161, 438199, H01L 2100
Patent
active
059435615
ABSTRACT:
A CMOS device includes a first conductivity type semiconductor substrate having an active region, the active region including two second conductivity type of impurity regions and a first channel region between the two second conductivity type impurity regions, a field insulation region on the semiconductor substrate for electrical isolation of the active region from other adjacent active regions, a second conductivity type semiconductor layer on the field insulation layer, the semiconductor layer including two first conductivity type impurity regions and a second channel region between the two first conductivity type impurity regions, and a gate electrode over the first channel region in the active region and the second channel region in the semiconductor layer.
REFERENCES:
patent: 4651408 (1987-03-01), MacElwee et al.
patent: 4654121 (1987-03-01), Miller et al.
patent: 4918510 (1990-04-01), Pfiester
patent: 5334861 (1994-08-01), Pfiester et al.
Brown Peter Toby
Duong Khanh
LG Semicon Co. Ltd.
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