CMOS processing with low and high-current FETs

Details CMOS processing with low and high-current FETs CMOS processing with low and high-current FETs

1995-12-21

1996-08-20

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437 34, 437 57, H01L 218238

Patent

active

055478948

ABSTRACT:
A method of processing CMOS circuits provides up to three types of transistors (standard NFETs, PFETs and high current NFETs) without additional masking steps by the simultaneous implantation of the standard PFET and the high current NFET low doped source and drain implants and a separate implantation of the standard NFET.

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