Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1994-09-30
1996-05-14
Jackson, Jerome
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257345, 257369, 257392, H01L 27092, H01L 218238
Patent
active
055170498
ABSTRACT:
The present invention provides a CMOS integrated circuit in which core transistors are provided with punch-through pockets, while the input/output transistors are not provided with punch-through pockets. Punch-through protection for the input/output transistors by virtue of their larger dimensions. The pockets, like lightly doped drains, are formed after the gates are formed but before the formation of gate sidewalls. However, the input/output are masked during the punch-through implants, but are unmasked for at least one of the lightly doped drain implants. The absence of pockets on the input/output transistors enhances their ESD resistance, and thus the ESD resistance of the incorporating integrated circuit.
REFERENCES:
patent: 4894694 (1990-01-01), Cham et al.
Anderson Clifton L.
Jackson Jerome
VLSI Technology Inc.
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