CMOS image sensors and methods of manufacturing the same

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation

Reexamination Certificate

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C438S059000, C438S069000, C438S073000, C438S199000, C438S200000, C257S222000, C257S232000, C257S290000, C257S291000, C257S292000, C257SE21131

Reexamination Certificate

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07875491

ABSTRACT:
A complementary metal-oxide-semiconductor image sensor may include: a semiconductor substrate; a photodiode formed on a first portion of the semiconductor substrate; a transfer gate formed on the semiconductor substrate, near the photodiode, to transfer optical charges accumulated in the photodiode; a floating diffusion area formed on a second portion of the semiconductor substrate, on an opposite side of the transfer gate from the photodiode, to accommodate the optical charges; and/or a channel area formed under the transfer gate and contacting a side of the photodiode to transfer the optical charges. The transfer gate may be formed, at least in part, of transparent material. A method of manufacturing a complimentary metal-oxide-semiconductor image sensor may include: forming the photodiode; forming the floating diffusion area, separate from the photodiode; and/or forming the transfer gate, near the photodiode, to transfer optical charges accumulated in the photodiode.

REFERENCES:
patent: 5272355 (1993-12-01), Namavar et al.
patent: 6943070 (2005-09-01), Yang
patent: 2003/0096443 (2003-05-01), Hwang
patent: 2007/0158710 (2007-07-01), Mheen et al.
patent: 08-088396 (1996-04-01), None
patent: 1020000048110 (2000-07-01), None
patent: 1020030044333 (2003-06-01), None

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