CMOS image sensor and method for fabricating the same

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region

Reexamination Certificate

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C438S433000

Reexamination Certificate

active

11319067

ABSTRACT:
A CMOS image sensor includes a first conductive type semiconductor substrate having an active region and a device isolation region, a device isolation film formed in the device isolation region of the semiconductor substrate, a second conductive type diffusion region formed in the active region of the semiconductor substrate, and an ion implantation prevention layer formed in the vicinity of the device isolation film, including a boundary portion between the device isolation film and the second conductive type diffusion region.

REFERENCES:
patent: 5801083 (1998-09-01), Yu et al.
patent: 6979587 (2005-12-01), Lee
patent: 7005689 (2006-02-01), Song et al.
patent: 2005/0142775 (2005-06-01), Koh
patent: 2005/0179071 (2005-08-01), Mouli
patent: 10-2003-0056323 (2003-07-01), None
patent: 2005-062143 (2005-06-01), None

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