Cluster tool process chamber having integrated high pressure...

Details Cluster tool process chamber having integrated high pressure... Cluster tool process chamber having integrated high pressure...

2004-09-30

2008-11-04

Stinson, Frankie L (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

C134S200000, C134S902000

Reexamination Certificate

active

07445015

ABSTRACT:
A cluster tool includes a transfer chamber connected to a plurality of vacuum chambers. An additional process chamber connected to the transfer chamber includes a high pressure chamber assembly seated on a housing. The high pressure chamber assembly, which is adjustable between an open position and a closed position, includes an upper chamber portion and a lower chamber portion. Hydraulic cylinders mounted on the upper chamber portion and having chamber rods that attach to the lower chamber portion are configured to move the lower chamber relative to the upper chamber portion between the two positions. When the two portions are brought together into the closed, the high pressure chamber assembly forms a high pressure chamber suitable for processing wafers with supercritical CO2. Once the high pressure chamber is formed, a region between lower chamber portion and a housing may be evacuated to form a vacuum chamber outside a portion of the high pressure chamber.

REFERENCES:
patent: 3681171 (1972-08-01), Hojo et al.
patent: 4355937 (1982-10-01), Mack et al.
patent: 4827867 (1989-05-01), Takei et al.
patent: 5169408 (1992-12-01), Biggerstaff et al.
patent: 5314574 (1994-05-01), Takahashi
patent: 5820692 (1998-10-01), Baecker et al.
patent: 5898727 (1999-04-01), Fujikawa et al.
patent: 5979306 (1999-11-01), Fujikawa et al.
patent: 6221781 (2001-04-01), Siefering et al.
patent: 6321134 (2001-11-01), Henley et al.
patent: 6334266 (2002-01-01), Moritz et al.
patent: 6494670 (2002-12-01), Kroeker
patent: 6497239 (2002-12-01), Farmer et al.
patent: 6508259 (2003-01-01), Tseronis et al.
patent: 6559070 (2003-05-01), Mandal
patent: 6666928 (2003-12-01), Worm
patent: 6722642 (2004-04-01), Sutton et al.
patent: 6763840 (2004-07-01), DeSimone et al.
patent: 6921456 (2005-07-01), Biberger et al.
patent: 7077917 (2006-07-01), Jones
patent: 2001/0041122 (2001-11-01), Kroeker
International Search Report and Written Opinion, PCT/US05/33508, mailed Oct. 2, 2007.
International Preliminary Report on Patentability for PCT/US2005/033508 dated Nov. 9, 2007.

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