Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
Reexamination Certificate
2006-12-26
2006-12-26
Patel, Ramesh (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Mechanical control system
C700S282000, C700S283000, C700S289000, C700S275000, C073S001730, C073S001740, C073S001160, C073S001360, C137S002000, C137S007000, C137S008000, C137S009000, C702S045000, C702S046000, C702S047000, C702S055000
Reexamination Certificate
active
07155319
ABSTRACT:
A method for controlling liquid delivery in a processing chamber. The method includes generating an analog input (AI) signal proportional to a process variable and calculating an analog output (AO) signal based on a setpoint and a deadband. The setpoint is a target value of the process variable and the deadband is an allowable tolerance around the setpoint that determines when the control logic is activated to control the process variable. The method further includes transmitting the AO signal to a control device and adjusting the process variable proportional to the value of the AO signal.
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Chen David Z.
D'Ambra Allen L.
Li Tao
Nangoy Roy C.
Rabinovich Yevgeniy
Applied Materials Inc.
Patel Ramesh
Patterson & Sheridan LLP
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