Closed-loop control of a chemical mechanical polisher

Details Closed-loop control of a chemical mechanical polisher Closed-loop control of a chemical mechanical polisher

2006-08-29

2006-08-29

Wilson, Lee D. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C451S028000

Reexamination Certificate

active

07097534

ABSTRACT:
A method of controlling a chemical mechanical polishing system in which an inner tolerance, an outer tolerance and a specification tolerance limit are received by a control system. The user selects one of the inner tolerance and the outer tolerance, and the user selects a polishing machine procedure for the selected tolerance. A first substrate is polished with the chemical mechanical polishing system, and a thickness of at least one layer in the substrate is measured at an in-line metrology station. If the measured thickness exceeds the selected tolerance, the selected procedure is performed.

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