Closed-loop comb drive sensor

Details Closed-loop comb drive sensor Closed-loop comb drive sensor

2008-04-01

2008-04-01

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S504140

Reexamination Certificate

active

11420401

ABSTRACT:
A closed-loop, comb drive device that reduces certain “common mode” sensor errors. The device includes a comb structure, electronics, a substrate, and a position sensor. The comb structure includes two comb-drive sections, each having at least two subsections. The comb drive sub-sections in each section are positioned in a diagonal relationship to each other relative to the device axes. A separate pick-off section, along with the electronics, determine which of the two drive sections should receive a voltage differential, and the size of that differential. The diagonal relationship within each drive section eliminates many of the large scale factor errors which often occur in prior-art designs.

REFERENCES:
patent: 5895851 (1999-04-01), Kano et al.
patent: 6910379 (2005-06-01), Eskridge et al.
patent: 7051590 (2006-05-01), Lemkin et al.

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