Cleaning technique for LPE melt ingots

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156DIG111, 156DIG89, 134 3, 134 42, C30B 1900

Patent

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045669341

ABSTRACT:
In the liquid phase epitaxy growth of Group III-V compound semiconductors using boat-slider apparatus, melt-carry-over is essentially eliminated by prebaking the metallic solvent (e.g., In shot) in the boat to form ingots and then etching the ingots in dilute nitric or hydrochloric acid prior to adding solutes (e.g., GaAs, InP, dopants). This process removes contaminants which coalesce on the ingots and cause poor wipe-off.

REFERENCES:
patent: 3677228 (1972-07-01), Panish et al.
patent: 3890194 (1975-06-01), Ettenberg

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