Cleaning and liquid contact with solids – Apparatus – Having self cleaning means
Patent
1997-06-16
1999-06-29
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
Having self cleaning means
134111, 134172, 134201, 134115R, B08B 302
Patent
active
059153989
ABSTRACT:
A cleaning station for cleaning parts from apparatus that itself uses a water spray to clean a toxic gas. The cleaning station has a tray and a sink for holding a part to be spray cleaned and the sink is connected to drain the spray water into the drain system of the gas cleaning apparatus.
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Chen Ying-Hsiang
Lee Chwan-Der
Ackerman Stephen B.
Robertson William S.
Saile George O.
Stinson Frankie L.
Taiwan Semiconductor Manufacturing Company , Ltd.
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