Cleaning solution for substrates of electronic materials

Details Cleaning solution for substrates of electronic materials Cleaning solution for substrates of electronic materials

2006-08-01

2006-08-01

Webb, Gregory (Department: 1751)

Cleaning compositions for solid surfaces, auxiliary compositions

Cleaning compositions or processes of preparing

For cleaning a specific substrate or removing a specific...

C510S176000, C438S692000

Reexamination Certificate

active

07084097

ABSTRACT:
The present invention relates to a cleaning solution capable of removing efficiently at the same time particles and metallic impurities from a substrate surface without corroding metallic materials.The cleaning solution for cleaning substrates of electronic materials comprises an organic acid compound and at least one selected from the group consisting of dispersants and surfactants.

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