Cleaning methods for silicon electrode assembly surface...

Details Cleaning methods for silicon electrode assembly surface... Cleaning methods for silicon electrode assembly surface...

2007-07-24

2007-07-24

Smith, Zandra V. (Department: 2822)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C438S689000, C438S745000, C134S003000, C134S026000, C134S028000

Reexamination Certificate

active

11019727

ABSTRACT:
Silicon electrode assembly decontamination cleaning methods and solutions, which control or eliminate possible chemical attacks of electrode assembly bonding materials, comprise ammonium fluoride, hydrogen peroxide, acetic acid, optionally ammonium acetate, and deionized water.

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