Brushing – scrubbing – and general cleaning – Machines – Brushing
Patent
1995-05-11
1997-06-10
Scherbel, David
Brushing, scrubbing, and general cleaning
Machines
Brushing
15 882, 15 211, 15 971, 15102, A46B 1304
Patent
active
056364016
ABSTRACT:
The present invention provides a cleaning apparatus having object holding means for holding an object to be cleaned such that a surface of the object to be cleaned faces a cleaning body and a cleaning mechanism for moving and rotating the cleaning body for cleaning the surface of the object to be cleaned, wherein the object to be cleaned and the cleaning body are moved relative to each other in a state where the cleaning body is in contact with the surface to the object to be cleaned at a specified contact pressure, thereby cleaning the surface of the object to be cleaned, the cleaning mechanism including a rotatable arm, cleaning body supporting means rotatably supporting a cleaning body, and elevating means, attached to the arm, for moving up and down the cleaning body supporting means.
REFERENCES:
patent: 4382308 (1983-05-01), Curcio
patent: 4476601 (1984-10-01), Oka
patent: 5144711 (1992-09-01), Gill, Jr.
patent: 5282289 (1994-02-01), Hasegawa
patent: 5351360 (1994-10-01), Suzuki
patent: 5375291 (1994-12-01), Tateyama
patent: 5421056 (1995-06-01), Tateyama
patent: 5475889 (1995-12-01), Thrasher
patent: 5485644 (1996-01-01), Shinbara
Hamada Tomoko
Ishizaka Nobukazu
Yonemizu Akira
Chin Randall
Scherbel David
Tokyo Electron Kyushu Limited
Tokyo Electron Limited
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