Cleaning apparatus and a cleaning method

Details Cleaning apparatus and a cleaning method Cleaning apparatus and a cleaning method

1997-10-27

1999-12-21

Stinson, Frankie L.

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 254, 134902, 134184, 134198, B08B 310

Patent

active

060035277

ABSTRACT:
In a cleaning apparatus, a cleaning solution spray means itself is given a function of producing OH.sup.- ionized water and H.sup.+ ionized water and can spray OH.sup.- ionized water and H.sup.+ ionized water, as cleaning solutions immediately after they are produced, upon a substrate to be cleaned, and one of OH.sup.- ionized water and H.sup.+ ionized water can be selectively used as a cleaning solution. This cleaning apparatus includes a substrate holding member for holding a substrate to be cleaned, and a cleaning solution spray member for spraying a cleaning solution upon the substrate. The cleaning solution spray member includes an electrolytic ion generating member for radical-activating or ionizing pure water, and an ultrasonic wave generating member for spraying the radical-activated or ionized pure water, by carrying it on ultrasonic waves, upon the substrate.

REFERENCES:
patent: 4064885 (1977-12-01), Dussault
patent: 4132567 (1979-01-01), Blackwood
patent: 4326553 (1982-04-01), Hall
patent: 4994051 (1991-02-01), Porter
patent: 5364512 (1994-11-01), Earl
patent: 5368054 (1994-11-01), Koretsky
patent: 5591334 (1997-01-01), Shimizu
patent: 5762779 (1998-06-01), Shiramizu
patent: 5779796 (1998-07-01), Tomoeda

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