Clamping ring and susceptor therefor

Details Clamping ring and susceptor therefor Clamping ring and susceptor therefor

1993-03-11

1994-07-05

Bueker, Richard

Fishing, trapping, and vermin destroying

4272481, 118728, 118725, 118500, 118503, C23C 1600

Patent

active

053267257

ABSTRACT:
A clamping ring having a downwardly extending finger that mates with a pocket in the periphery of a susceptor for supporting a wafer in a chemical vapor deposition chamber, provides alignment of the clamping ring, the wafer and the susceptor. A source of inert gas connected to the pocket provides a positive pressure in the pocket that prevents reactive gas in the chamber from reaching the edge and backside of the wafer. A source of vacuum connected to the susceptor support surface ensures good contact between the wafer and the susceptor.
The clamping ring also has a lip extending over the top surface of the wafer having a rear surface that has a negative angle with respect to the upper surface of the clamping ring, providing a knife edge seal to the wafer, reducing the area of contact between the clamping ring and the wafer and providing a reduced area of thermal contact between the clamping ring and the wafer.

REFERENCES:
patent: 4932358 (1990-06-01), Studley
patent: 4951601 (1990-08-01), Maydan
patent: 5075256 (1991-12-01), Wang

Affiliated with

Also associated with

Rating

Clamping ring and susceptor therefor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Clamping ring and susceptor therefor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Clamping ring and susceptor therefor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-795875