Circuit structure with a parasitic transistor having high...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S394000, C257S401000, C257S503000, C257S773000

Reexamination Certificate

active

06642582

ABSTRACT:

CROSS-REFERENCE TO RELATED APPLICATIONS
This patent application is a United States counterpart to and claims the benefit of the priority date of European Patent Application No. 98830461.4 filed on Jul. 30, 1998, which is hereby incorporated by reference.
FIELD OF THE INVENTION
This invention relates to a semiconductor circuit structure comprising a parasitic transistor with a very high threshold voltage.
BACKGROUND OF THE INVENTION
As is well known, the need to have an ever larger number of devices integrated in one chip has led to a significant reduction in the thickness of the field and isolation oxides which define the active areas of devices provided in the chip.
More generally, during the fabrication process of different devices, successive oxide removing steps are to be carried out in order to produce oxide layers having different thicknesses. This requirement becomes more difficult to meet where transistors capable of standing high voltages are to be provided on the same chip which accommodates low voltage transistors.
Such successive oxide layer-removing steps also affect the isolation oxide layers. This results in further thinning of the thick (isolation) oxides, and attendant lowering of the threshold voltage of the parasitic transistors which form between adjacent devices. Such lowering is often undesirable. Therefore, there is a need for a circuit structure that overcomes these shortcomings in the prior art.
SUMMARY OF THE INVENTION
Briefly, according to the invention, a circuit structure integrated in a semiconductor substrate comprises at least one pair of transistors, each formed in a respective active area region of the semiconductor substrate. Each transistor has a source region, a drain region, and a channel region located between the source and drain regions and being overlaid by a gate region. The gate regions of the transistor pair are connected electrically together by an overlying conductive layer and respective contacts, wherein the contacts between the gate regions and the conductive layer are formed above the active areas.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1
is an enlarged top plan view showing schematically a portion of a semiconductor wherein a first embodiment of a prior art circuit structure has been formed.
FIG. 2
is an enlarged vertical cross-section view, taken along line
11

11
in
FIG. 1
, showing schematically the first embodiment of a prior art circuit structure.
FIG. 3
is an enlarged top plan view showing schematically a portion of a semiconductor wherein a second embodiment of a prior art circuit structure has been formed.
FIG. 4
is an enlarged vertical cross-section view, taken along line IV—IV in
FIG. 3
, showing schematically the second embodiment of a prior art circuit structure.
FIG. 5
is an enlarged top plan view showing schematically a portion of a semiconductor wherein a first embodiment of the circuit structure according to the invention has been formed.
FIG. 6
is an enlarged vertical cross-section view, taken along line VI—VI in
FIG. 3
, showing schematically the first embodiment of the circuit structure according to the invention.
FIG. 7
is an enlarged top plan view showing schematically a portion of a semiconductor wherein a second embodiment of the circuit structure according to the invention has been formed.
FIG. 8
is an enlarged vertical cross-section view, taken along line VIII—VIII in
FIG. 7
, showing schematically the second embodiment of the circuit structure according to the invention.
FIG. 9
is an enlarged vertical cross-section view, taken along line IX—IX in
FIG. 7
, showing schematically the second embodiment of the circuit structure according to the invention.


REFERENCES:
patent: 4872010 (1989-10-01), Larson et al.
patent: 4951112 (1990-08-01), Choi et al.
patent: 5714394 (1998-02-01), Kadosh et al.
patent: 5789791 (1998-08-01), Bergemont
patent: 5945726 (1999-08-01), Prall et al.
patent: 6015726 (2000-01-01), Yoshida
patent: 6159844 (2000-12-01), Bothra
patent: 0 513 639 (1992-11-01), None
patent: 60-57673 (1985-04-01), None
patent: 63-54763 (1988-03-01), None
patent: 7-161824 (1995-06-01), None
Silicon Processing for the VLSI Era, vol. 2, Wolf S., 1990 by Lattice Press, pp. 144-147 and 623-628.*
European Patent Abstract of Japanese Publication No. 60057673, published Apr. 3, 1985.
European Patent Abstract of Japanese Publication No. 63054763, published Mar. 9, 1988.
European Patent Abstract of Japanese Publication No. 07161824, published Jun. 23, 1995.
European Search Report dated Dec. 8, 1998, with annex on European Application No. EP 98 83 0461.

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