Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Patent
1997-10-23
1999-11-16
Guay, John
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
324765, H01L 2358
Patent
active
059862815
ABSTRACT:
A circuit and method for detecting mobile ion contamination in a semiconductor device. The circuit uses two transistor structures on the same silicon chip as the circuit being tested to detect the presence (or absence) of mobile ions. The test includes imposing conditions on the silicon chip that may cause any mobile ions present therein to move within the structure. By measuring electrical parameters, such as a band gap voltage, across the transistors before and after the imposition of such conditions, a reliable indication of the presence or absence of mobile ions can be obtained.
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Burchanowski William Edward
Khoini-Poorfard Ramin
Reed Jeffrey Alan
Guay John
Lucent Technologies - Inc.
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