Chip contacts without oxide discontinuities

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357 67, H01L 2348

Patent

active

048397156

ABSTRACT:
An integrated circuit chip including a first and a higher second surface levels with an abrupt sidewall step transition therebetween, and having a first layer of a first conductive material disposed over the first surface level and over the second surface level, but terminating on the first surface level in a first end portion which extends up to but does not touch the sidewall. This end portion comprises a conductive material which has been converted to an insulator. A second layer of a second conductive material is disposed on top of the first conductive layer with essentially no conductive material conversion to insulator therein adjacent to the abrupt sidewall transition. In a preferred embodiment, the conductive material is an alloy of aluminum and the end portion is aluminum oxide.

REFERENCES:
patent: 4028206 (1977-07-01), King
patent: 4154874 (1979-05-01), Howard et al.
patent: 4214018 (1980-07-01), Halon et al.
patent: 4307132 (1981-12-01), Chu et al.
patent: 4460618 (1984-07-01), Heinecke et al.
patent: 4525221 (1985-06-01), Wu

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