Chimney capacitor

Details Chimney capacitor Chimney capacitor

1995-03-16

1996-07-23

Limanek, Robert P.

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257309, 257382, H01L 27108

Patent

active

055392300

ABSTRACT:
A chimney capacitor is formed having two plates, of which each is disposed above and contacts a corresponding electrical contact. The electrical contacts facilitate electrical access to the plates of the chimney capacitor. One of the electrical contacts may comprise part of a general wiring layer that may be used for both electrically accessing the capacitor and for general wiring within the IC chip. Formation of the chimney capacitor proceeds by first forming two electrical contacts on an integrated circuit ("IC") chip. A planar insulating layer is formed thereover, and the capacitor is formed at least partially within the planar insulating layer such that each plate is electrically connected to a corresponding electrical contact.

REFERENCES:
patent: 4650544 (1987-03-01), Erb et al.
patent: 5061650 (1991-10-01), Dennison et al.
patent: 5150276 (1992-09-01), Gonzalez et al.
patent: 5200635 (1993-04-01), Kaga et al.
patent: 5218219 (1993-06-01), Ajika et al.
patent: 5234855 (1993-08-01), Rhodes et al.
patent: 5284787 (1994-02-01), Ahn
patent: 5292677 (1994-03-01), Dennison
patent: 5414655 (1995-05-01), Ozaki et al.
patent: 5497016 (1996-03-01), Koh

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