Chemically inert flow controller with non-contaminating body

Details Chemically inert flow controller with non-contaminating body Chemically inert flow controller with non-contaminating body

2011-01-11

2011-01-11

Hepperle, Stephen (Department: 3753)

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

C137S486000, C137S859000, C174S254000, C174S268000

Reexamination Certificate

active

07866337

ABSTRACT:
A flow controller including a unitary controller body with a chemically inert fluid conduit having an insertable constriction or orifice disposed within the conduit having a reduced cross-sectional area to thereby restrict the flow of fluid within the conduit allowing for reliable flow measurement. An integrated circuit or controller may be coupled to the control valve and also coupled to the pressure sensors by a lead structure including signal conductors surrounded by a Faraday cage, and a chemically inert housing coupled to the unitary controller body enclosing the control valve and the pressure sensors.

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Supplementary European Search Report for Application No. EP 06 78 6652, dated Aug. 28, 2008.

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