Chemically amplified, radiation-sensitive resin composition

Details Chemically amplified, radiation-sensitive resin composition Chemically amplified, radiation-sensitive resin composition

1996-02-02

1998-03-24

Young, Christopher G.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

G03F 7004

Patent

active

057311250

ABSTRACT:
A chemically amplified, radiation-sensitive resin composition which comprises a radiation-sensitive acid-generator which generates an acid upon irradiation with a radiation and in which the chemical change due to the catalytic action of said acid changes the solubility of the irradiated portion in a developer to form a pattern, characterized by comprising an anthracene derivative of the formula (1), representatives of which are anthracene-9-methanol and anthracene-9-carboxyethyl.

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Chemical Abstracts, vol. 122, No. 10, Mar. 6, 1995, AN-118690r.
Chemical Abstracts, vol. 118, No. 8, Feb. 22, 1993, AN-69897v.

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