Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1995-06-05
1996-10-15
Chu, John S. Y.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
4302701, 430326, 430905, G03C 706
Patent
active
055653049
ABSTRACT:
A chemically amplified-type radiation-sensitive composition comprising:
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Chu John S. Y.
OCG Microelectronic Materials Inc.
Simons William A.
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