Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1994-08-19
1996-08-27
Chu, John S. Y.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430326, 430905, G03F 7039
Patent
active
055500048
ABSTRACT:
A chemically amplified-type radiation-sensitive composition comprising:
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Chu John S. Y.
OCG Microelectronic Materials Inc.
Simons William A.
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