Chemically amplified positive resist composition, a...

Details Chemically amplified positive resist composition, a... Chemically amplified positive resist composition, a...

2007-06-19

2007-06-19

Chu, John S. (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S905000, C430S910000

Reexamination Certificate

active

11123104

ABSTRACT:
The present invention provides a chemically amplified positive resist composition comprising(A) a resin which comprises(i) at least one structural unit selected from the group consisting of structural units of the formulas (no and (V), (ii) a structural unit of the formula (I) and (iii) a structural unit of the formula (II), and(B) an acid generator.The present invention also provides a haloester derivative of the formula (XXI) and a process for producing the same

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