Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2005-12-19
2009-12-01
Kelly, Cynthia H (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C560S001000
Reexamination Certificate
active
07625689
ABSTRACT:
The present invention provides a chemically amplified positive resist composition comprising(i) a polymer which is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid,(ii) an acid generator, and(iii) a compound of the formula (I).The present invention also provides an ester derivative useful as a component of the chemically amplified positive resist composition, and process for producing the ester derivative.
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Sato et al. JP 2000-010285 A, English translation (machine translation).
Sato et al., JP 2000-302839 A, English translation (machine translation).
Sakamoto Hiromu
Takemoto Ichiki
Yamaguchi Satoshi
Birch & Stewart Kolasch & Birch, LLP
Johnson Connie P
Kelly Cynthia H
Sumitomo Chemical Company Limited
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