Chemically amplified polymer having pendant group with...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C430S905000, C430S910000, C526S269000, C526S281000, C526S308000, C560S118000, C560S128000

Reexamination Certificate

active

07344820

ABSTRACT:
The present invention relates to a chemically amplified polymer having a pendent group with dicyclohexyl bonded thereto, a process for the preparation thereof, and a resist composition comprising it, and more particularly, to a novel (meth)acrylic or norbornene carboxylate compound with dicyclohexyl bonded thereto, a process for the preparation thereof, a chemically amplified polymer synthesized therewith, and a positive photoresist composition for ArF comprising said polymer, with high resolution and excellent etching resistance.

REFERENCES:
patent: 5968713 (1999-10-01), Nozaki et al.
patent: 6420082 (2002-07-01), Sato et al.
patent: 6576392 (2003-06-01), Sato et al.
patent: 1996-101509 (1996-04-01), None
patent: 2001-40033 (2001-05-01), None
patent: 2001-85567 (2001-09-01), None
patent: 2002-47866 (2002-06-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Chemically amplified polymer having pendant group with... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Chemically amplified polymer having pendant group with..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chemically amplified polymer having pendant group with... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3960866

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.