Coating processes – Electrical product produced – Metallic compound coating
Patent
1993-07-12
1997-07-15
Padgett, Marianne
Coating processes
Electrical product produced
Metallic compound coating
4272553, 427314, 4273762, 4273722, 117 94, 117104, 117 88, 437225, B05D 512, C23C 1600, C30B 2814
Patent
active
056481144
ABSTRACT:
A substrate is prebaked in an oxygen furnace. A thin film of layered superlattice oxide is formed on the substrate by a chemical vapor deposition process. The film is RTP baked to provide grains with a mixed phase of A-axis and C-axis orientation. The film may be treated by ion implantation prior to the RTP bake and oxygen furnace annealed after the RTP bake. An electrode is deposited on the layered superlattice thin film and then the film and electrode are oxygen furnace annealed.
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Mihara Takashi
Paz De Araujo Carlos A.
Scott Michael C.
Watanabe Hitoshi
Olympus Optical Co,. Ltd.
Padgett Marianne
Symetrix Corporation
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