Chemical vapor deposition of titanium from titanium...

Details Chemical vapor deposition of titanium from titanium... Chemical vapor deposition of titanium from titanium...

2007-09-11

2007-09-11

Everhart, Caridad (Department: 2891)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C257SE21168, C438S681000

Reexamination Certificate

active

11298978

ABSTRACT:
A process for depositing titanium metal layers via chemical vapor deposition is disclosed. The process provides deposited titanium layers having a high degree of conformality, even in trenches and contact openings having aspect ratios greater than 1:5.

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