Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2007-05-17
2011-10-11
Gambetta, Kelly M (Department: 1715)
Coating processes
Coating by vapor, gas, or smoke
C427S250000, C427S255280, C427S255310
Reexamination Certificate
active
08034407
ABSTRACT:
A multi-step method for depositing ruthenium thin films having high conductivity and superior adherence to the substrate is described. The method includes the deposition of a ruthenium nucleation layer followed by the deposition of a highly conductive ruthenium upper layer. Both layers are deposited using chemical vapor deposition (CVD) employing low deposition rates.
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Baum Thomas H.
Bilodeau Steven M.
Hendrix Bryan C.
Roeder Jeffrey F.
Welch James J.
Advanced Technology & Materials Inc.
Chappuis Maggie
Gambetta Kelly M
Hultquist Steven
Hultquist IP
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