Chemical sensor and method of making same

Details Chemical sensor and method of making same Chemical sensor and method of making same

1996-08-27

1999-09-07

Speer, Timothy

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing gas sample

G01N 2700

Patent

active

059483610

ABSTRACT:
A chemical sensor (10) is formed in part by depositing a stack of dielectric and resistive layers (13-15) on a support substrate (11). A cavity (17) is then formed on a substrate (16) to provide thermal isolation to the chemical sensor (10). The stack of dielectric and resistive layers (13-15) is then bonded to the substrate (16) and the support substrate (11) is removed. A layer of chemical sensing material (30) is then formed on the uppermost dielectric layer (15). Openings (33) may be formed through the stack of dielectric and resistive layers (13-15) to further enhance the thermal isolation of the chemical sensor (10) from the substrate (16).

REFERENCES:
patent: 4324761 (1982-04-01), Harris
patent: 4343768 (1982-08-01), Kimura
patent: 4706493 (1987-11-01), Chang et al.
patent: 4786476 (1988-11-01), Munakata et al.
patent: 4892834 (1990-01-01), Rauh
patent: 4984446 (1991-01-01), Yagawara et al.
patent: 5012671 (1991-05-01), Yagawara et al.
patent: 5250170 (1993-10-01), Yagawara et al.

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