Chemical polishing process and apparatus

Details Chemical polishing process and apparatus Chemical polishing process and apparatus

1988-04-14

1989-05-02

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156639, 156645, 156662, 156345, 252 791, B44C 122, H01L 21306

Patent

active

048265632

ABSTRACT:
A polyurethane disc having a reservoir and spokes cut therein is used in conjunction with potassium triiodide and ethylene glycol to polish mercury cadmium tellurium and cadmium tellurium electro-optical crystals. This process has been found to eliminate the need for lapping damage removal etch. The polyurethane disc is used with a lapping machine and run at low speed.

REFERENCES:
patent: 3549439 (1970-12-01), Kaneggia et al.
patent: 4588473 (1986-05-01), Hisatomi et al.
patent: 4600469 (1986-07-01), Fusco et al.

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