Chemical apparatus and process disinfecting – deodorizing – preser – Control element responsive to a sensed operating condition – Control element responds proportionally to a variable signal...
Reexamination Certificate
2006-12-12
2006-12-12
Caldarola, Glenn (Department: 1764)
Chemical apparatus and process disinfecting, deodorizing, preser
Control element responsive to a sensed operating condition
Control element responds proportionally to a variable signal...
C210S097000, C205S099000, C205S101000, C205S123000, C205S157000, C204S232000, C204S277000
Reexamination Certificate
active
07147827
ABSTRACT:
A chemical control system for controlling the chemistry of a chemical solution having predetermined chemical constituents in a plating system, such as a NiFe plating system, employs a mix container for containing a plating solution and a hold container for containing a plating solution delivered from the mix container. A precision delivery arrangement delivers a precise predetermined quantum of a predetermined constituent of the plating solution to multiple mix containers and the hold containers. Transfer of plating solution between the mix and hold containers is effected by a transfer pump. Nitrogen gas that has been humidified with deionized water protects the plating solution from either acquiring water or becoming dehydrated, the humidified nitrogen gas being humidified to a predetermined relative humidity with respect to the temperature of the plating solution in the mix container. This is achieved by urging the nitrogen gas through a column that is at the same temperature as the plating solution. Precise delivery of the chemical constituents is achieved by a pneumatic pump arranged serially with an orifice and an inexpensive flow meter. The pneumatic pump is a positive displacement, double diaphragm pump.
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Applied Materials Inc.
Caldarola Glenn
Patterson & Sheridan LLP
Wachtel Alexis
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