Chemical mechanical polishing with a polishing sheet and a suppo

Details Chemical mechanical polishing with a polishing sheet and a suppo Chemical mechanical polishing with a polishing sheet and a suppo

1999-04-30

2000-10-24

Morgan, Eileen P.

Abrading

Abrading process

Glass or stone abrading

451 59, 451303, 451307, 451309, B24B 100

Patent

active

061358592

ABSTRACT:
A chemical mechanical polishing apparatus has a platen, a polishing sheet extending between a first roller and a second roller, and a support sheet extending between a third roller and a fourth roller. A portion of the polishing sheet extends over a surface of the platen to polish a substrate, and a portion of the support sheet extends between the platen and the polishing sheet. The polishing sheet may be a continuous belt or a reel-to-reel tape, and the support sheet may be a continuous belt or reel-to-reel tape.

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