Chemical mechanical polishing slurry for metal layers

Details Chemical mechanical polishing slurry for metal layers Chemical mechanical polishing slurry for metal layers

1994-10-06

1996-06-18

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

252 791, 51308, 106 3, B24B 100, H01L 2100

Patent

active

055274234

ABSTRACT:
A slurry for use in chemical-mechanical polishing of a metal layer comprising high purity fine metal oxide particles uniformly dispersed in a stable aqueous medium.

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