Chemical mechanical polishing aqueous dispersion and...

Compositions – Etching or brightening compositions

Reexamination Certificate

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Details

C252S079400, C216S089000, C216S090000, C216S103000, C438S692000, C438S693000, C438S700000, C451S036000

Reexamination Certificate

active

11038190

ABSTRACT:
A chemical mechanical polishing aqueous dispersion comprises abrasives (A) containing ceria, an anionic water-soluble polymer (B) and a cationic surfactant (C), wherein the amount of the anionic water-soluble polymer (B) is in the range of 60 to 600 parts by mass based on 100 parts by mass of the abrasives (A) containing ceria, and the amount of the cationic surfactant (C) is in the range of 0.1 to 100 ppm based on the whole amount of the chemical mechanical polishing aqueous dispersion.

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Chemical Information Sheet by the National Institute of Health, National Library of Medicine, Specialized Information Services (NLM); Internet Publishing May 2004; □ □ http://householdproducts.nlm.nih.gov/cgi-bin/household/brands?tbl=chem&id=1540□ □.

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