Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2005-09-20
2005-09-20
Hail, III, Joseph J. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S006000, C451S009000, C451S041000
Reexamination Certificate
active
06945845
ABSTRACT:
Conductive elements of a chemical mechanical polishing system may generate undesired eddy currents under the influence of a time-dependent magnetic field used in an eddy current monitoring system. To improve the accuracy of an eddy current monitoring system, elements that may contribute an undesired signal to the sensed eddy current signal may be fabricated from a non-conductive material such as plastic or ceramic. In some implementations, elements may be fabricated from non-magnetic materials.
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Bennett Doyle E
David Jeffrey Drue
Johansson Nils
Koppikar Sandeep R
Swedek Boguslaw A
Applied Materials Inc.
Fish & Richardson
Hail III Joseph J.
Muller Bryan R
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