Chemical mechanical polisher with grooved belt

Details Chemical mechanical polisher with grooved belt Chemical mechanical polisher with grooved belt

2005-01-04

2005-01-04

Hail, III, Joseph J. (Department: 3723)

Abrading

Machine

Endless band tool

C451S041000, C451S060000, C451S285000, C451S286000, C451S287000, C451S296000, C451S303000, C451S305000, C451S306000

Reexamination Certificate

active

06837779

ABSTRACT:
A chemical mechanical polishing apparatus has a substrate holder, a polishing belt, and a backing member positioned on a side of the polishing belt opposite the substrate holder. The polishing belt has a polishing surface to contact at least a portion of the substrate held by the substrate holder. The polishing belt is movable in a first direction in a generally linear path relative to the substrate. The polishing belt has a plurality of grooves formed therein.

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