Compositions – Etching or brightening compositions
Reexamination Certificate
2006-04-04
2006-04-04
Norton, Nadine (Department: 1765)
Compositions
Etching or brightening compositions
C252S079400, C438S692000
Reexamination Certificate
active
07022255
ABSTRACT:
A composition and associated method for chemical mechanical planarization (or other polishing) are described. The composition comprises an organometallic-modified colloidal abrasive and a nitrogen-containing polymer compound (e.g., a polyalkyleneimine, such as polyamidopolyethyleneimine). The composition possesses both high stability towards gelling and/or solids formation and high selectivity for metal removal in metal CMP. The composition may further comprise an oxidizing agent in which case the composition is particularly useful in conjunction with the associated method for metal CMP applications (e.g., copper CMP).
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Hu Bin
Siddiqui Junaid Ahmed
Chase Geoffrey L.
DuPont Air Products Nanomaterials LLC
Norton Nadine
Umez-Eronini Lynette T.
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