Chemical etching of transformed structures

Details Chemical etching of transformed structures Chemical etching of transformed structures

1982-06-21

1984-05-22

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156603, 156643, 156656, 156657, 156662, 156DIG64, 156DIG80, 156DIG111, 427 86, C23F 102, B44C 122, C03C 1500, H01L 21306

Patent

active

044500416

ABSTRACT:
A maskless technique is disclosed for shaping semiconductor materials by ming areas that are selectively etchable with respect to the rest of the structure. In one embodiment of this invention, a body of amorphous material is subjected to radiation by a focused energy beam so as to convert a predetermined region of the amorphous material into a region of crystalline material. The converted region etches at a slower rate than the non-converted amorphous material. In a second embodiment of the present invention, a method of selectively etching a metal is disclosed which includes the step of subjecting a predetermined region of the metal to be impinged upon by a shaped ion beam so as to ion implant the predetermined region. A chemical etch is applied to the metal and to the ion implanted region of the metal and the ion implanted region etches at a slower rate than the portion of the metal outside the ion implanted region. In another embodiment of the present invention, a method of selectively etching a dielectric is disclosed which includes the step of subjecting a predetermined region of the dielectric to be impinged upon by a shaped ion beam so as to ion implant the predetermined region. A chemical etch is applied to the dielectric and to the ion implanted region of the metal and the ion implanted region etches at a faster rate than the portion of the dielectric outside the ion implanted region.

REFERENCES:
patent: 3585088 (1971-06-01), Schwuttke et al.
patent: 3615935 (1971-10-01), O'Keeffe
patent: 3666548 (1972-05-01), Brack et al.
patent: 3682729 (1972-08-01), Gukelberger et al.
patent: 3769109 (1973-10-01), MacRae et al.
patent: 3853648 (1974-12-01), Janus et al.
patent: 4319954 (1982-03-01), White

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