Agitating – Having specified feed means – Responsive to condition sensor
Reexamination Certificate
2008-04-29
2008-04-29
Cooley, Charles E. (Department: 1797)
Agitating
Having specified feed means
Responsive to condition sensor
C366S162100
Reexamination Certificate
active
11439303
ABSTRACT:
A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.
REFERENCES:
patent: 3807701 (1974-04-01), Reid et al.
patent: 3877682 (1975-04-01), Moss
patent: 5288145 (1994-02-01), Mackey et al.
patent: 5332311 (1994-07-01), Volk et al.
patent: 5580168 (1996-12-01), Alireza et al.
patent: 5800056 (1998-09-01), Suzuki et al.
patent: 6572255 (2003-06-01), Husher
patent: 7063455 (2006-06-01), Achkire et al.
patent: 0136961 (1985-04-01), None
patent: 2081119 (1982-02-01), None
patent: 7-198554 (1995-08-01), None
Achkire Younes
Frankel Jonathan S.
Lam Kien-Bang
Svirchevski Julia
Applied Materials Inc.
Cooley Charles E.
Dugan & Dugan PC
LandOfFree
Chemical dilution system for semiconductor device processing... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Chemical dilution system for semiconductor device processing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chemical dilution system for semiconductor device processing... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3947212