Agitating – Having specified feed means – Responsive to condition sensor
Reexamination Certificate
2008-04-29
2008-04-29
Cooley, Charles E. (Department: 1797)
Agitating
Having specified feed means
Responsive to condition sensor
C366S162100
Reexamination Certificate
active
07364349
ABSTRACT:
A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.
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Achkire Younes
Frankel Jonathan S.
Lam Kien-Bang
Svirchevski Julia
Applied Materials Inc.
Cooley Charles E.
Dugan & Dugan PC
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