Fluent material handling – with receiver or receiver coacting mea – Processes
Reexamination Certificate
2000-09-14
2001-08-21
Maust, Timothy L. (Department: 3751)
Fluent material handling, with receiver or receiver coacting mea
Processes
C141S083000, C141S086000, C222S111000
Reexamination Certificate
active
06276404
ABSTRACT:
CROSS-REFERENCE TO RELATED APPLICATIONS
Not applicable.
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
Not applicable.
BACKGROUND OF THE INVENTION
The present invention is directed to the field of high purity chemical storage and dispensing for the electronics fabrication industry.
In the fabrication of electronic components, it is frequently required to have various high purity chemicals in liquid or two phase liquid/vapor state contained in canisters of various sizes for supply to the fabrication processes or for cleaning.
It has become the industry norm to contain these canisters of high purity chemical in cabinets typically made of metal and having various automated features such as dispense, level signals and changeout signals for when a canister is empty or near empty.
Since many of the high purity chemicals are toxic, caustic or environmentally controlled, it is important to contain the chemicals in the cabinet to avoid inadvertent vapor discharge or liquid discharge. Historically, inadvertent vapor discharge has been addressed by having the cabinet vented to a house or factory-wide abatement system. However, a risk also prevails for liquid discharge from a failing canister or the connections between the canister and the downstream manifold in the cabinet.
Various trays or dollys with marginal lips or sidewalls are known in the industry to contain modest liquid leaks, such as the advertisement of Victor Associates, Inc. showing a side view of a wheeled polypropylene container with a reservoir for containing 20 gallons of liquid. Secondary containment around the reservoir is mentioned.
Various carts with spill containment are illustrated in the advertisement from Terra Universal, Inc. showing Chem Carts A. through F.
The advertisement of Schumacher for the TransFill II-LRM indicates that 110% spill containment is achieved. This spill containment is achieved by use of a fixed cabinet integral spill pan.
An advertisement by Schumacher for the TransFill II-TFL uses a caster mounted tray with short sidewalls to provide partial secondary containment.
U.S. Pat. No. 5,950,693 shows a cabinet with a transportation cart, FIG. 3, #300, holding a container of chemical. The cart is used to hold a majority of any spill, col. 6, line 50.
The industry has long sought a safe and effective way to store canisters of high purity chemical for dispensing in electronic industry fabrication, as well as other industries. Various partial secondary containments have been used to contain partial spills. Various carts and trays are known for such use. More significant containment has been taught, but it usually requires an inability to access or service the failing container or requires greater height than the typical industry standard cabinet requires. With expensive electronic fabrication floor space at a premium, the industry has long sought an economical space conserving way to contain potentially significant chemical spills from containers while still being able to access the failing container without further spilling leaked liquid chemical and without changing the “footprint” of the cabinet storing the container in the fab.
The present invention addresses the above recited shortcomings of the prior art and succeeds in providing complete secondary containment without increased cabinet height and without elaborate additional carts or trays, as will be set forth in greater detail below.
BRIEF SUMMARY OF THE INVENTION
The present invention is a high purity chemical storage and delivery system with secondary containment, comprising; a cabinet for containing a canister of high purity chemical, a manifold in the cabinet for fluid connection between the canister and the cabinet for controllably dispensing high purity chemical; a control unit for controlling the dispensing of high purity chemical from the canister and the cabinet for a downstream use, a closeable opening in the cabinet for allowing loading and unloading of the canister from the cabinet, at least one door for closing the opening, a liquid tight secondary containment door in the opening for closing off a portion of the opening such that the secondary containment door is sized so that said portion is sufficient to define a volume in conjunction with the cabinet to contain the entire high purity chemical liquid contents of the canister.
The present invention is also a process for containing the entire contents of a high purity chemical canister in a cabinet, comprising; providing a cabinet for containing a high purity chemical canister with an opening for a canister, providing a canister containing a high purity chemical at least partially in a liquid physical state, providing a liquid tight secondary containment door in the opening for closing off a portion of the opening such that the secondary containment door is sized so that the portion is sufficient to define a volume in conjunction with the cabinet to contain the entire high purity chemical liquid contents of the canister, and in the event of liquid high purity chemical leaking from the canister when in the cabinet, retaining leaking liquid high purity chemical in the cabinet by liquid tight engagement of the secondary containment door to the cabinet.
REFERENCES:
patent: 5950693 (1999-09-01), Noah et al.
patent: 6056024 (2000-05-01), Noah et al.
Advertisement from Terra Universal, Inc., Chem. Carts A-F.
Advertisement of Schumacher for TransFill™ II-LRM.
Advertisement of Schumacher for TransFill™ II-TFL.
Advertisement of Victor Associates, Inc. of wheeled polypropylene container with reservoir.
Birtcher Charles Michael
Sheehy William J.
Steidl Thomas Andrew
Air Products and Chemicals Inc.
Chase Geoffrey L.
Maust Timothy L.
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