Coating apparatus – With indicating – testing – inspecting – or measuring means
Patent
1997-06-11
1999-07-27
Edwards, Laura
Coating apparatus
With indicating, testing, inspecting, or measuring means
118 52, 118319, B05C 1102
Patent
active
059284250
ABSTRACT:
This chemical catcher is provided to collect chemical materials in the manufacturing process of the semiconductor device. In particular, this collects the remaining chemical materials for preventing the undesirable effects incurred by the remaining chemical materials after the chemical materials are practically used in the manufacturing process of the semiconductor device. This chemical catcher is mounted to a chemical injecting apparatus which injects the chemical in the manufacturing process of semiconductor, which is comprised of a chemical collecting means arranged in relation to an injection nozzle of the chemical injecting apparatus in order to collect the falling chemical from the injection nozzle, by which means the remaining chemical in the injection nozzle after the chemical injection process is effectively collected and therefore the production of semiconductor having poor quality is reduced.
REFERENCES:
patent: 5261566 (1993-11-01), Nakayama
Edwards Laura
Padgett Calvin
Samsung Electronics Co,. Ltd.
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