Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1984-01-23
1986-03-25
Richman, Barry S.
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
156627, 2065242, 220445, 220448, 422199, 422240, C23F 302
Patent
active
045781370
ABSTRACT:
A chemical bath apparatus is disclosed in which an open topped beaker having a heater mounted to the exterior wall thereof is supported in an open topped surrounding housing or shell by a support assembly, the beaker being in spaced relation to the shell. The support assembly includes a sleeve mounted in sealed relation around the heater so as to isolate the same from corrosive fumes and a resilient pad extending over a substantial area of the bottom wall of the beaker for support of substantially the entire weight of the beaker and chemical substance through the bottom wall. Vent openings for convection cooling between the shell and sleeve are also provided.
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The Condensed Chemical Dictionary, Tenth Ed., Van Nostrand Reinhold Co., pp. 403, 435 and 471, 1981.
Chickering Robert B.
Grunewald Glen R.
Heaney Brion P.
Richman Barry S.
Wafab, Inc.
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