Charging sensor method and apparatus

Details Charging sensor method and apparatus Charging sensor method and apparatus

2005-11-01

2005-11-01

Munson, Gene M. (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

C257S288000, C257S356000, C257S360000

Reexamination Certificate

active

06960784

ABSTRACT:
A charging sensor is provided to detect charging signal during the manufacturing process of integrated circuits and various semiconductor devices. In one embodiment, the charging sensor includes a charging-sensitive insulator layer and complementary elements designed to effectively provide an indicative potential drop across the charging sensitive insulator.

REFERENCES:
patent: 5781445 (1998-07-01), Shiue et al.
patent: 6091113 (2000-07-01), Tanaka
patent: 6265729 (2001-07-01), Nelson et al.
patent: 6747303 (2004-06-01), Schroeder

Affiliated with

Also associated with

Rating

Charging sensor method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charging sensor method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charging sensor method and apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3471988