Electric lamp and discharge devices – With positive or negative ion acceleration
Patent
1996-11-08
1999-10-19
Patel, Nimeshkumar D.
Electric lamp and discharge devices
With positive or negative ion acceleration
3133621, 31323101, 31323131, H01J 2716
Patent
active
059694700
ABSTRACT:
A charged particle source applicable for etching, thin film deposition, or surface modification includes a conductive electrode for controlling the plasma potential and beam voltage, the electrode retaining long term conductivity during operation, such as by shielding or in situ cleaning during operation, and/or by being operated in pulse mode conditions capable of preventing charge accumulation in the source during ion extraction.
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DiStefano Salvatore A.
Druz Boris L.
Hayes Alan V.
Kanarov Victor
Lakios Emmanuel N.
Patel Nimeshkumar D.
Veeco Instruments Inc.
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